mems测试 mems testing ; mems test
MEMS测试技术 MEMS measuring technique
MEMS动态测试 MEMS dynamic testing
微机电系统力学测试芯片 MEMS mechanical tesing chip
A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.
介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。
A new system for the in situ extraction of the material parameters of MEMS films is presented.
给出了一种MEMS薄膜材料参数的在线测试技术与方法。
The single axis table series rt 1100 is an accurate position rate system designed for the test and calibration of MEMS, gyros, accelerometers and inertial guidance systems.
单轴平台系列rt 1100是一个高精度位率系统，其设计宗旨在于测试及校正MEMS、陀螺仪，加速表和惯性制导系统。
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