Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
The rapid progress of semi-conductor technology on deep sub-micro and nanometer scale announces the SOC era of IC design.
深亚微米和纳米级的半导体技术迅速进步，使得集成电路的设计已经进入系统集成芯片时代。
This method can be used to directly write many different types of metal or semiconductor features on Si substrates with sub 50 nanometer linewidth.
用这种方法可以在硅表面直接书写线宽度低于50纳米的多种金属和半导体组成的纳米结构。
Thin films are widely used in MEMS with different thicknesses from micron, sub-micron to nanometer scale.
MEMS中大量使用薄膜材料，厚度可达微米、亚微米直至纳米量级。
The experiments show that the phase scanning method is right and innovative and the ability of the sub-nanometer space increment is reached.
实验结果表明，本文捉出的相位扫描方法原理正确，具有创新性，达到了变栅距光栅所要求的亚纳米级的栅距变化精度。
The integrated systems range up to several hundred micrometers, and its sensitivity reaches nanometer, sub-nanometer or even pico-meters (10-12 m).
本集成系统的量程高达几百个微米，而它的灵敏度却可以达到纳米、亚纳米，甚至皮米(10 - 12m)。
As the semiconductor manufacturing process technology into the deep sub-micron or even nanometer, power consumption is becoming increasingly prominent.
随着集成电路工艺制程进入超深亚微米甚至纳米级，集成电路的功耗问题显得日益突出。
It is found that the calculating method accuracy may be improved from the level of nanometer to that of sub-nanometer.
结果表明，混合多步误差分离法可将计算方法的准确度由纳米级提高到亚纳米级。
It is found that the calculating method accuracy may be improved from the level of nanometer to that of sub-nanometer.
结果表明，混合多步误差分离法可将计算方法的准确度由纳米级提高到亚纳米级。
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