Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.

超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。

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The rapid progress of semi-conductor technology on deep sub-micro and nanometer scale announces the SOC era of IC design.

深亚微米和纳米级的半导体技术迅速进步，使得集成电路的设计已经进入系统集成芯片时代。

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This method can be used to directly write many different types of metal or semiconductor features on Si substrates with sub 50 nanometer linewidth.

用这种方法可以在硅表面直接书写线宽度低于50纳米的多种金属和半导体组成的纳米结构。

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The key to cracking that nut is apparently the new thermal assisted optical element Fujitsu's developed, allowing for an ultra-tiny sub-hundred nanometer optical spot size, which in turn should enable recording on the one terabit (not byte, let's not get crazy here) per square inch level.

ENGADGET: Fujitsu building a bigger, smaller hard drive