The physical effects of high dose ion implantation are discussed. The formation process of SIMOX materials and their various applications are described.
讨论了高剂量注入的物理效应，介绍了利用高剂量氧注入硅合成SIMOX材料的物理过程以及SIMOX技术的多种应用。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
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