The physical effects of high dose ion implantation are discussed. The formation process of SIMOX materials and their various applications are described.
讨论了高剂量注入的物理效应，介绍了利用高剂量氧注入硅合成SIMOX材料的物理过程以及SIMOX技术的多种应用。
The physical effects of high dose ion implantation are discussed. The formation process of SIMOX materials and their various applications are described.
讨论了高剂量注入的物理效应，介绍了利用高剂量氧注入硅合成SIMOX材料的物理过程以及SIMOX技术的多种应用。
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