A sliding mode synchronization controller of the reticle stage was added to the conventional PID control system.

在常规pid控制系统基础上增加了掩模台精动滑模同步控制器。

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A sliding mode synchronization controller of the reticle stage was added to the conventional PID control system.

在常规pid控制系统基础上增加了掩模台精动滑模同步控制器。

youdao