The measure device consists of two quadrant detectors, which measure alignment errors in real-time.
该系统采用两个四象限探测器构成对准检测装置，实现对掩模版对准误差的实时检测。
In the paper, a novel beam orienting mechanism utilizing no CCD or quadrant detectors is presented.
本文一种新颖的不使用CCD或四象限传感器的光束定向机理。
This paper presents a new optical system used for quadrant detection, in which point detectors, rather than area detectors, can be used.
本文提出一种新型的用于四象限探测的光学系统，该系统可以用点探测器代替面探测器。
Two additional detectors are placed alongside the main quadrant detector in order to pick up these subsidiary beams.
两个附加的探测器被置于四分成像探测器两边，用于捡取副光束。
Two additional detectors are placed alongside the main quadrant detector in order to pick up these subsidiary beams.
两个附加的探测器被置于四分成像探测器两边，用于捡取副光束。
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