The measure device consists of two quadrant detectors, which measure alignment errors in real-time.
该系统采用两个四象限探测器构成对准检测装置，实现对掩模版对准误差的实时检测。
In the paper, a novel beam orienting mechanism utilizing no CCD or quadrant detectors is presented.
本文一种新颖的不使用CCD或四象限传感器的光束定向机理。
This paper presents a new optical system used for quadrant detection, in which point detectors, rather than area detectors, can be used.
本文提出一种新型的用于四象限探测的光学系统，该系统可以用点探测器代替面探测器。
应用推荐