In an exemplary embodiment, a plasma processing chamber is provided.
在一个示范性实施例中，提供一种等离子处理室。
A method of fault detection for use in a plasma processing chamber is provided.
提供一种用于等离子处理室的失效检测方法。
Plasma processing technology is a new technology developed in semiconductor manufacturing.
等离子体加工技术是在半导体制造中创立起来的一种新技术。
The plasma processing chamber includes a substrate support configured to receive a substrate.
该等离子处理室包括一个配置为容纳基片的基片支撑件。
The developing experiment device of RF discharge plasma processing and measurement is introduced.
介绍了自行研制的高频放电等离子体处理及测试实验装置。
A plasma generation arrangement configured to provide plasma downstream to a plasma processing chamber.
一种等离子生成装置，其配置为将等离子向下提供至等离子处理室。
In this regard, plasma processing technology and shows its unique charm, and many of the successful example.
在此方面，等离子体处理技术又显示出其独特的魅力，且不乏各类成功的范例。
Charged dust particles exist extensively in plasmas produced in space, laboratory as well as for plasma processing.
带电的尘埃粒子广泛存在于宇宙空间、实验室的等离子体装置中和材料的等离子体加工等环境中。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
本发明提供能够在处理基体上形成均匀的薄膜的微波等离子体处理装置和气体供给构件。
We study effects of low-pressure and air pressure plasma processing parameters in treating PVA films and desizing process of cotton fabric.
以上浆织物为研究对象时，强力和芯吸高度也逐渐增大，退浆率也随着等离子处理时间的延长而增大。
Methods in modeling and numerical simulation for the high density plasma processing are introduced, namely, continuous and kinetic methods.
介绍了与高密度等离子体工艺相关的模型和数值模拟方法，即连续流和动力学方法。
The wafer plasma processing chamber is configured to react the reactive radical with a species at a surface of a wafer disposed in the wafer plasma processing chamber.
晶片等离子体加工室的结构设置成使反应性自由基与放置在晶片等离子体加工室内的晶片表面上的物质反应。
The results reflect that treated by low temperature plasma processing the surface squama of yak hair is etched and the effect of air plasma is better than that of oxygen plasma.
研究结果表明，低温等离子体表面改性处理能够刻蚀牦牛毛纤维表面的鳞片，而且空气等离子体的刻蚀效果优于氧等离子体的刻蚀效果；
Therefore, the activation of the surface modification of polytetrafluoroethylene, mostly by plasma processing method, convenient operation, significantly reduce the wastewater treatment.
因此，目前对于聚四氟乙烯表面的活化处理，大多采用等离子体处理法进行，操作方便，还明显减少了废水处理。
It was agreed that the Blood Donor Program must continue to operate at its present level (300,000 bleedings per month) and that plasma processing facilities be used without interruption.
与会者一致认为献血计划必须继续运行在目前的水平(30万每月性出血量)和血浆处理设施必须不间断地被使用。
Broadly speaking, the embodiments of the present invention provide an improved plasma processing mechanism, apparatus, and method to increase the process uniformity at the very edge of the substrate.
大体而言，本发明的实施例提供了改进的等离子处理机构、设备和方法以提高基片边缘处的处理均匀性。
The cost of reprocessing was about a third of the cost of processing fresh plasma obtained from voluntary donors.
后处理成本约为一个新鲜血浆的处理费用的三分之一，血液来自自愿捐助者。
The method of data processing for exploding wire plasma with holographic interferometry is described.
本文介绍了用全息干涉法诊断爆炸丝等离子体的数据处理方法。
When materials processing using laminar argon plasma jets is performed in ambient air, the entrainment of air into the jets will lead to the oxidation of processed metallic materials.
在空气环境中利用氩等离子体射流进行材料加工时，环境空气卷吸进入射流可能会引起金属材料氧化。
An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上，并且将来自射频电源的射频功率传输到加工室内部。
In the field of thick board processing, our plasma cutting can not only ensure quality of the product, but take the superiority in term of processing cost.
在厚板加工领域，我们的等离子切割不仅可以保证产品的质量，更在加工成本上占据优势。
Charged dusts exist widely in space plasma, laboratory fusion devices and plasma assistant processing equipment.
带电尘埃广泛存在于空间等离子体，实验室聚变装置及等离子体辅助加工设备中。
The results of plasma grafting polymerization processing show that surface grafting AA is an effective method to overcome the timing-effect.
涤纶的等离子体改性加液相接枝丙烯酸处理结果表明，接枝是克服等离子体处理方法存在时间效应的有效手段。
The plasma is also treated in processing multiple times to inactivate any virus that was undetected during the screening process.
血浆还要经过多项处理使在检测过程中没有检测到的病毒失去活性。
This article reviews the basic physics of ECR discharge and experimental research, and describes new applications of ECR plasma in surface processing, plasma coating and ion source.
本文综述了ECR放电的基本物理过程和实验研究概况，介绍了ECR等离子体在表面处理、镀膜和离子源等方面应用的最新结果。
The design of plasma torch, which is the center part of surface metallurgy equipment by plasma-jet, the selection of alloying powder and processing parameter are analysed in the paper.
系统地分析和探讨了等离子束表面冶金设备的核心部件等离子炬的设计、表面冶金的合金材料的选择、表面冶金工艺的确定。
The plasma surface engineering technology as a new processing of preparation of wearable layer of gravure printing can as a substitute for plating was pointed out.
指出了等离子体表面技术可以作为替代电镀制备凹印版材的耐磨层的新工艺。
This article introduces processing of plasma chemistry and application of sputter coating and plasma-enhanced chemical vapor deposition in powder metallurgy especially.
介绍了等离子体化学工艺，特别着重介绍了溅射镀膜与等离子体化学气相沉积在粉末冶金中的应用。
The plasma nitriding process, the service condition, the selection of material and the plasma nitriding processing of the large-scale automobile cast iron dies were reviewed and discussed.
对铸铁的离子渗氮技术进行了综合评述，讨论了大型汽车覆盖件模具服役条件、材料选择和铸铁离子渗氮工艺。
The plasma nitriding process, the service condition, the selection of material and the plasma nitriding processing of the large-scale automobile cast iron dies were reviewed and discussed.
对铸铁的离子渗氮技术进行了综合评述，讨论了大型汽车覆盖件模具服役条件、材料选择和铸铁离子渗氮工艺。
应用推荐