Some binary optical elements were manufactured by parallel direct writing and inductive couple plasma etching technology.
利用并行直写技术与感应耦合等离子刻蚀技术制作了部分二元光学元件。
An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
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