Laser parallel direct writing 激光并行直写光刻
parallel laser direct writing 并行激光直写
Parallel laser direct writing system 并行激光直写系统
We propose the parallel direct writing method based on a transmitted intensity-modulating spatial light modulator. It can improve the writing speed owing to its stepper exposure mode.
针对传统直写技术写入速度慢、加工时间长的缺点,提出了基于透射式强度型空间光调制器的并行直写方法,采用逐个图形曝光方式可大大提高直写速度,降低生产成本。
参考来源 - 二元光学元件矢量衍射设计与并行直写制作·2,447,543篇论文数据，部分数据来源于NoteExpress
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