This is an ideal mechanism which is suitable for nanometer positioning.
这是一种适合纳米定位的理想机构。
The interferometer at nanometer positioning integration system is set up.
建立了集成纳米定位装置的干涉仪系统。
The multi-valued-mapping hysteresis nonlinearity of the piezoceramic actuator seriously degrades the scale accuracy when used in the nanometer positioning system.
研究压电陶瓷执行器应用于纳米定位系统时，其多值映射的迟滞特性对系统定位控制精度影响。
The network can reduce the modeling error for the piezoelectric actuator of a nanometer positioning system. Experimental results proved validity of the algorithm.
将该网络应用于纳米定位系统压电陶瓷执行器迟滞建模中，可以降低建模误差，实验结果验证了该方法的有效性。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
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