In order to simplify the MWECR CVD system using multiple electromagnetic coils, the new magnetic fields generated by assembling a electromagnetic coils and a permanent magnet unit are presented.
为了简化多电磁线圈m WECR -CVD装置，提出将单个电磁线圈和一个永磁体单元组合，以形成所需的新型磁场。
In order to simplify the MWECR CVD system using multiple electromagnetic coils, the new magnetic fields generated by assembling a electromagnetic coils and a permanent magnet unit are presented.
为了简化多电磁线圈m WECR -CVD装置，提出将单个电磁线圈和一个永磁体单元组合，以形成所需的新型磁场。
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