A new large area microwave plasma source has been developed.
研制了一种新的大面积微波等离子体源。
Such technologies as microwave plasma, water plasma and packed-bed plasma were discussed.
着重总姑了微波等离子体技术、水等离子体技术、填充床等离子体技术等。
In this paper, the result of etching application with microwave plasma will be introduced.
本文介绍微波等离子体刻蚀应用的实验结果。
A low power inductively-coupled microwave plasma source based on planar spiral microstrip at 2.
本文提出一种基于平面螺旋微带的2。
A simplified model for microwave plasma interaction in cylindrical cavity resonator is presented.
提出了一个谐振腔内微波与等离子体相互作用的简化模型。
This invention is a chromatographic detector in which the ion source is a microwave plasma torch.
本发明是用微波等离子体矩作电离源的一种新型离子化色谱检测器。
In this paper diamond films were deposited using bell-jar type microwave plasma assisted CVD system.
本文系统研究了石英钟罩式微波等离子体辅助化学气相沉积装置对沉积金刚石薄膜的影响。
A fast engineering algorithm of Microwave Plasma Thruster (MPT) performance prediction was presented.
对微波等离子推进器提出一种快速性能预估的工程算法。
In this study, the microwave plasma device is designed to excite and maintain stable plasma on atmospheric press.
本研究设计了一套微波等离子体反应器，在大气压下激发并维持稳定的等离子体。
A new method in which carbon monoxide and methane are directly converted to light hydrocarbons by microwave plasma 2.
一氧化碳和甲烷直接转化成低碳烃的一种新方法。
The method is useful to the study of microwave plasma characterization and the realization of fast impedance matching.
该方法有助于微波等离子体特性的研究和实现快速阻抗调配。
The diamond films were fabricated by microwave plasma CVD and the boron-doped was created by the cold ion implantation.
本文采用微波等离子体cvd法制备定向生长的金刚石薄膜。用冷离子注入法对金刚石薄膜进行硼掺杂。
Carbon nanotube films were synthesized on Ni substrate by microwave plasma chemical vapor deposition at low temperature.
以镍片为基板材料，利用微波等离子体化学气相沉积法在低温条件下合成了纳米碳管膜。
With microwave plasma, the reaction of methane coupling to C_2 hydrocarbons was investigated along with the reaction time.
着重介绍了冷等离子体工艺技术用于甲烷偶联工艺、反应装置及反应机理的研究进展。
A novel microwave plasma-enhanced glow discharge (MPEGD) lamp was used as excitation source for the analysis of solid samples.
报道了一种改进型的微波等离子体增强辉光放电(MPEGD)光源，并将这种级联光源用于固体导电样品的分析。
The globe-like diamond microcrystalline aggregates were fabricated by microwave plasma chemical vapor deposition (MPCVD) method.
以镍为催化剂，利用微波等离子体化学气相沉积法制备了弹簧状碳纤维。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
本发明提供能够在处理基体上形成均匀的薄膜的微波等离子体处理装置和气体供给构件。
A new method for post treatment of porous silicon, sulfur passivation by microwave plasma assistance in vacuum, is reported in this paper.
报道了对多孔硅进行后处理的一种新方法，即真空中微波等离子体辅助的硫钝化处理。
Microwave plasma torch atomic emission spectrometry(MPT-AES) was used to determine the content of calcium and zinc in kelp after being digested.
分别使用常规消解方法与微波消解方法处理海带样品，采用微波等离子体炬原子发射光谱法（MPT-AES）测定海带中钙和锌的含量。
Under the catalytic effect of nickel particles, spring-like carbon filaments were synthesized through microwave plasma chemical vapor deposition.
以镍为催化剂，利用微波等离子体化学气相沉积法制备了弹簧状碳纤维。
This paper has two parts: (1) methane coupling under microwave plasma catalysis, (2) acetylene conversion into ethylene under conventional method.
本论文的研究内容有两个方面：（1）微波等离子体催化的甲烷偶联反应，（2）传统技术催化乙炔加氢转化为乙烯。
The experiment of the deposition of diamond thin films is made on silicon substrate by using microwave plasma chemical vapor deposition (CVD) system.
利用微波等离子体化学气相沉积(CVD)设备，在硅基片上进行了金刚石薄膜的沉积实验。
Plasma systems 400 and 660 are low-pressure microwave plasma systems for cleaning advanced chip packages prior to die attach, wire bond and encapsulation.
等离子体400和660系列是低压微波等离子体应用于提高模具粘合，引线的焊接，特别是清洗高级的芯片封装。
Microwave plasma thruster (MPT) was applied to the sub system of DFH 3 satellite to complete its orbit transfer (OT) and north south station keeping (NSSK).
将微波等离子推力器(MPT)应用于“东方红三号”(DFH3)卫星的推进子系统，完成其轨道转移和南北位置保持任务。
Diamond coatings were deposited on cemented carbide substrates with H2, CH4 and D4 as precursors by using microwave plasma chemical vapor deposition technique.
利用微波等离子体化学气相沉积方法，以H 2、CH4和八甲基环四硅氧烷(D4)为原料，在硬质合金基体上沉积了金刚石涂层。
The hydrogen and boron ion bombardments were performed by applying a negative bias voltage to the substrate during microwave plasma chemical vapor deposition process.
在微波等离子体化学气相沉积金刚石膜时，采用负偏压使氢和硼离子轰击金刚石膜表面。
Only when the resonant cavity of microwave Plasma Thruster (MPT) is under the resonant state, the microwave energy can heat propellant gas to produce thrust efficiently.
微波等离子推力器(mpt)谐振腔只有在谐振状态下，微波能量才能被高效地用于加热工质产生推力。
The result indicates that the microwave plasma sintering can short the sintering time and improve the properties of CaZrO3 ceramics as compared with the routine methods.
结果表明，微波等离子体烧结技术与常规法相比，其烧结时间明显缩短，性能有所改善。
A new method for determining trace-level copper ion was proposed based on flow-injection on-line preconcentration and microwave plasma torch atomic emission spectrometry.
基于流动注射-在线柱预浓集-微波等离子体炬原子发射光谱，对在线浓集测定流路和各种测试条件进行优选，建立了一种测定痕量铜的新方法。
A new method for determining trace-level copper ion was proposed based on flow-injection on-line preconcentration and microwave plasma torch atomic emission spectrometry.
基于流动注射-在线柱预浓集-微波等离子体炬原子发射光谱，对在线浓集测定流路和各种测试条件进行优选，建立了一种测定痕量铜的新方法。
应用推荐