A new large area microwave plasma source has been developed.
研制了一种新的大面积微波等离子体源。
In this paper, the result of etching application with microwave plasma will be introduced.
本文介绍微波等离子体刻蚀应用的实验结果。
Microwave energy is used to heat the fill material and generate the plasma.
微波用来激发填充物和产生等离子。
Microwave energy is used to heat the fill material and generate the plasma.
微波用来激发填充物和产生等离子。
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