Microbridge mass airflow sensors of AWM series, a new kind of airflow sensors, applied in micro airflow measurements is presented.
介绍一种新型气体流量传感器——AWM系列微桥式气流质量传感器在微小气体流量测量中的应用。
The prepared monocrystalline substrate plane has an Angle to crystalline 001 plane and superconductive film microbridge is etched in the inclined direction to 001 plane.
制作的单晶衬底平面应与晶体001面呈一夹角，沿着晶体001面倾斜的方向刻蚀成超导薄膜微桥。
The prepared monocrystalline substrate plane has an Angle to crystalline 001 plane and superconductive film microbridge is etched in the inclined direction to 001 plane.
制作的单晶衬底平面应与晶体001面呈一夹角，沿着晶体001面倾斜的方向刻蚀成超导薄膜微桥。
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