Optimizing analysis of the Key scale parameters of microbridge was carried out in the seting scale space using a finite element model, the effect of these parameters on deformation was analysed.
对微桥的一些关键尺寸参数在规定的取值空间内进行建模优化设计,并分析了这些参数对位移形变和应力的影响。
参考来源 - 氧化钒薄膜材料及非制冷红外探测器微结构设计的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Microbridge mass airflow sensors of AWM series, a new kind of airflow sensors, applied in micro airflow measurements is presented.
介绍一种新型气体流量传感器——AWM系列微桥式气流质量传感器在微小气体流量测量中的应用。
The prepared monocrystalline substrate plane has an Angle to crystalline 001 plane and superconductive film microbridge is etched in the inclined direction to 001 plane.
制作的单晶衬底平面应与晶体001面呈一夹角，沿着晶体001面倾斜的方向刻蚀成超导薄膜微桥。
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