The application of finite element method (FEM) in the design of a membrane-type micro gas sensor is reported.
本文报道有限元方法在膜片型微结构气敏传感器设计中的应用。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The results show that YAG laser micro machining of Al 2O 3 plates used for the manufacture of the gas sensor arrays is easily controllable, flexible, convenient and cheap.
研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的制作方法。
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
The temperature distributing of micro-structure gas sensor based on silicon substrate is simulated by means of finite element analysis (FEA) tool ANSYS.
利用有限元分析工具ANSYS，对所设计的硅基微结构气体传感器的温度场进行了模拟。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
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