The characteristic size of MEMS components is from micron to millimeter.
MEMS器件的特征尺寸范围为几微米到几毫米。
As one of the most important components of RF circuits, high Q inductors realized with RF-MEMS are the most active research subjects.
作为射频电路的重要元件，高Q值电感已经成为RF -MEMS器件研究中的热点。
Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS.
多晶硅微悬臂梁是MEMS中的一个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
MEMS technology is thought as one of the most prospective manufacturing technologies for optical components.
MEMS技术由于其自身的诸多优点而被认为是目前最有前景的光器件制作技术之一。
MEMS technology is thought as one of the most prospective manufacturing technologies for optical components.
MEMS技术由于其自身的诸多优点而被认为是目前最有前景的光器件制作技术之一。
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