The characteristic size of MEMS components is from micron to millimeter.
MEMS器件的特征尺寸范围为几微米到几毫米。
As one of the most important components of RF circuits, high Q inductors realized with RF-MEMS are the most active research subjects.
作为射频电路的重要元件，高Q值电感已经成为RF - MEMS器件研究中的热点。
Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS.
多晶硅微悬臂梁是MEMS中的一个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。
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