B-doped diamond films were grown on graphite substrates by hot filament assisted CVD method (HFCVD).
采用固体三氧化二硼,用热丝辅助化学气相沉积法在石墨衬底上沉积了掺硼金刚石涂层。
In HFCVD system the substrate temperature is a key factor which deeply affects the quality of diamond films.
在热丝化学气相沉积金刚石系统中,衬底温度是影响金刚石成膜质量的关键因素之一。
The initial growth process of diamond grain synthesized by HFCVD method was investigated by using XL30FEG SEM.
用XL 30feg扫描电镜对热丝化学气相沉积(HFCVD)法合成的金刚石颗粒的初期生长过程进行了研究。
Polycrystalline silicon thin films were prepared by hot-filament chemical vapor deposition (HFCVD) on glass at low-temperatures.
采用热丝化学气相沉积法(HFCVD)在普通玻璃衬底上低温沉积多晶硅薄膜。
B-doped diamond films were grown on graphite substrates by hot filament assisted CVD method (HFCVD). The dopant was solid B_2O_3.
采用固体三氧化二硼,用热丝辅助化学气相沉积法在石墨衬底上沉积了掺硼金刚石涂层。
The effect of substrate surface pre-polishing on nucleation of diamond and structure of diamond thin films by HFCVD has been studied.
本文研究了在热丝CVD方法生长金刚石薄膜中,基片表面的研磨处理对金刚石成核密度以及生长膜结构的影响。
In this dissertation, extensive researches on the electrical and field emission properties of nano-carbon films prepared by hot filament chemical vapor deposition (HFCVD).
本文利用热灯丝化学气相沉积法(HFCVD)制备了纳米量级的碳薄膜材料,对它的电学性质及场发射性质进行了详细的研究。
The diamond films deposited on polished molybdenum by hot filament chemical vapor deposition (HFCVD) were investigated by scanning electron microscopy (SEM) and Raman spectroscopy.
利用热灯丝化学气相沉积方法在光滑的钼上沉积了金刚石膜。
In present work, (100) oriented CVD diamond films with different quality obtained by a hot-filament chemical vapor deposition (HFCVD) technique were used to fabricate radiation detectors.
本工作利用热丝化学气相沉积(HFCVD)法获得了(100)取向不同质量的金刚石薄膜,并制备了CVD金刚石辐射探测器。
To improve the quality of Ta Spinnerets with high hardness and alkali-proof corrosion, HFCVD is used to deposit crystalline diamond films with different sizes of grain on carbonized Ta spinnerets.
为改善钽喷丝头的品质,提高其硬度和耐碱腐蚀能力,利用热丝CVD制备不同粒径的金刚石薄膜,并通过对钽衬底的碳化处理,成功使之沉积于纯钽喷丝头表面,对纯钽喷丝头进行表面强化。
To improve the quality of Ta Spinnerets with high hardness and alkali-proof corrosion, HFCVD is used to deposit crystalline diamond films with different sizes of grain on carbonized Ta spinnerets.
为改善钽喷丝头的品质,提高其硬度和耐碱腐蚀能力,利用热丝CVD制备不同粒径的金刚石薄膜,并通过对钽衬底的碳化处理,成功使之沉积于纯钽喷丝头表面,对纯钽喷丝头进行表面强化。
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