The principles and features of raster scan, the function of the pattern generator and the process of the electron beam writing on the substrate under the control system are also introduced.
介绍了图形发生器的作用及电子束在控制系统作用下在基片上描绘图形的过程。
The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
The method of designing the control system based on PLC and configuration in the reconstruction of 20 KW electron beam furnace is described in this paper .
在20kw电子束炉改造中，重新设计了基于P LC和组态软件的控制系统，本文介绍了该系统的设计方法。
Electron beam welding machine consists of electron gun, high-voltage power, vacuum unit, vacuum welding chamber, electrical control system, fixture and working station running system and etc.
电子束焊机由电子枪、高压电源、真空机组、真空焊接室、电气控制系统、工装夹具与工作台行走系统等部分组成。
To control the electron beam emitted from the carbon nanotube (CNT) cathode, four different electron chunnels are designed.
为了控制碳纳米管阴极发射电子束的形状，设计了4种电子通道来控制电子束轨迹。
According to requirement of control system in electron beam single crystal furnace, hardware composition and software functions of the control system are described in detail.
结合电子束单晶熔炉对控制系统的要求，分别对控制软件的作用和构成进行了详细的说明。
An electron beam heating control method with controllable time zone and space zone belongs to material processing field.
一种时域和空域可控的电子束加热控制方法，属于材料加工领域。
An electron beam heating control method with controllable time zone and space zone belongs to material processing field.
一种时域和空域可控的电子束加热控制方法，属于材料加工领域。
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