The principles and features of raster scan, the function of the pattern generator and the process of the electron beam writing on the substrate under the control system are also introduced.
介绍了图形发生器的作用及电子束在控制系统作用下在基片上描绘图形的过程。
The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
The method of designing the control system based on PLC and configuration in the reconstruction of 20 KW electron beam furnace is described in this paper .
在20 kw 电子束炉改造中，重新设计了基于P LC和组态软件的控制系统，本文介绍了该系统的设计方法。
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