In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
为了提高微机电系统中静电-结构耦合数值计算速度，提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。
Electromechanical integrated; Toroidal drive; Manufacture of the stator; Manufacture of the toroidal worm; Curved beam; Minimum energy method; Efficiency.
机电集成； 超环面传动；定子加工； 环面蜗杆加工；曲线梁；最小能量法；效率。
The utility model is a high-efficiency and energy-saving electromechanical product with simple structure and convenient use, which is worth promoting.
本实用新型结构简单，使用方便，是一种高效、节能的机电产品，值得推广。
In chapter 2, based on analysis of energy conversion relation and efficiency of moving-iron type electromechanical converters, several methods for reducing power consumption are summarized.
第二章基于动铁式电-机械转换器的功能转换关系及其效率分析，概述了多种降低功耗的方法；
In chapter 2, based on analysis of energy conversion relation and efficiency of moving-iron type electromechanical converters, several methods for reducing power consumption are summarized.
第二章基于动铁式电-机械转换器的功能转换关系及其效率分析，概述了多种降低功耗的方法；
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