In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.

为了提高微机电系统中静电-结构耦合数值计算速度，提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。

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Electromechanical integrated; Toroidal drive; Manufacture of the stator; Manufacture of the toroidal worm; Curved beam; Minimum energy method; Efficiency.

机电集成； 超环面传动； 定子加工； 环面蜗杆加工； 曲线梁； 最小能量法； 效率。

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The utility model is a high-efficiency and energy-saving electromechanical product with simple structure and convenient use, which is worth promoting.

本实用新型结构简单，使用方便，是一种高效、节能的机电产品，值得推广。

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