The calculative method of the large field projection lithography lens is presented, and on the distortion measuring setup which is accomplished, distortion measurement of 8 inch wafer is completed.
提出了针对大视场投影光刻物镜畸变的计算方法，并在完成的畸变特性测量装置上进行了8英寸的硅片测量。
Essay brief a few kind methods of correcting distortion of Scan Projection Mask Alignment System.
介绍了调整扫描投影式光刻机畸变的几种方法。
For example, Projection objects profile and appearance of the projector. The objective should be better correction distortion and like a crooked.
不同需要可选用不同的物镜，例如，投影物体轮廓和外形的投影仪，物镜应较好地矫正畸变和像场弯曲；
For example, Projection objects profile and appearance of the projector. The objective should be better correction distortion and like a crooked.
不同需要可选用不同的物镜，例如，投影物体轮廓和外形的投影仪，物镜应较好地矫正畸变和像场弯曲；
应用推荐