• The products of CF4 decomposition are analysed.

    CF 4分解产物进行了分析。

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  • Send a message using the Universal Test Client to destination jms/loggingQueue using connection factoryjms/CF4.

    使用UniversalTestClient消息发送到使用连接factoryjms/CF4目的地jms/loggingQueue。

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  • The optical emission spectrum of r. f. plasma during amorphous silicon based film etching in CF4 gas is detected.

    该系统检测了仅用CF4作为刻蚀气体刻蚀非晶薄膜等离子体发射

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  • The highest DRE of CF4 is up to 99%. The DRE is increased with the increase of microwave power, and is decreased with the increase of gas flow rate.

    CF 4气体最高分解率可达99%以上,分解率随微波功率提高而增加,随气体流速的增加而减小

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  • The DRE of CF4 is enhanced about 10%by catalysts used, the ultraviolet radiation, high temperature and plasma all can actived the catalysts to decompose CF4.

    添加催化剂与微波等离子体协同分解CF4时,去除率可以提高10%左右紫外线高温等离子体自身可以激发催化剂催化分解CF4

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  • The experiments show that CF4 treatment to silicon wafers can not only activate them but also polish their surfaces effectively, and it can improve the pre-bonding greatly.

    实验表明CF4对硅片处理不仅可以激活表面而且可以硅片 表面进行有效抛光大大加强了预键合的效果。

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  • NF3 has a relatively short atmospheric lifetime (740 years) and dissociates more readily than C2F6 and CF4. HF ultimately diffuses down to the troposphere where it is removed by wet deposition.

    NF3具有相对大气寿命(740),C2F6CF4容易分解。HF最终扩散大气中,在大气中通过湿沉积除去。

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  • NF3 has a relatively short atmospheric lifetime (740 years) and dissociates more readily than C2F6 and CF4. HF ultimately diffuses down to the troposphere where it is removed by wet deposition.

    NF3具有相对大气寿命(740),C2F6CF4容易分解。HF最终扩散大气中,在大气中通过湿沉积除去。

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