• 采用直流磁控溅射工艺,室温载玻片制备了氧化锌透明导电薄膜。

    ZnO: Al thin films were prepared on slide glass substrates by non-reactive DC magnetron sputtering at room temperature.

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  • 采用扫描透射电镜STEM) ,研究了磁控溅射沉积薄膜形貌、组织、结构以及铀薄膜的生长模型

    Model of growth, surface morphology, microstructure and of the Uraniun films by magnetron sputter deposition have been investigated by scanning transmission electron microscopy(STEM).

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  • 射频磁控溅射阳极氧化模板表面制备了金属

    Metal aluminum films were deposited on AAO templates by radio-frequency magnetron sputtering.

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  • 静压法烧结制备了高导电性ZAO掺杂氧化锌陶瓷材,并用直流溅射法制备出ZAO透明导电薄膜

    Aluminum-doped zinc oxide (ZAO) ceramic targets for sputtering were fabricated by hot isostatic pressing (HIP) and ZAO transparent conducting thin films were prepared by dc magnetron sputtering.

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  • 磁控溅射沉积方法采用循环离子轰击循环轰击镀工艺金属制备了薄膜

    Aluminum film on uranium is prepared using magnetron sputtering with and without circulated argon ion bombardment process.

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  • 表面磁控溅射沉积镀层应力进行了热塑性有限元分析。

    The thermal stress in magnetron sputtered al coating on uranium substrate was studied by thermal elastic plastic finite element method (FEM).

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  • 使用V形槽工艺,溅射的方法代替扩硼工艺制备静电感应晶体管的栅极简化工艺流程,使器件调试过程具有很大灵活性

    The gate region was fabricated by V-groove and Al sputtering, which can simplify the process, and make devices flexible in the adjustment process.

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  • 采用直流磁控溅射溅射纯度为99.999%制备了超薄

    Ultrathin aluminum films were prepared by DC reactive magnetron sputtering. The target was made by 99.999% pure aluminum.

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  • 溅射离子不是简单单质外接而是组成合金膜。

    The magnetron-sputtering ion plated aluminium film is not simply a circumscribed coating of a single element, but of an alloy consisting of both aluminium and iron.

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  • 溅射离子不是简单单质外接膜,而是铜和组成的合金膜。

    The magnetron-sputtering ion plating aluminum film is not simply an out- covering layer of a single substance, but an alloy film containing both aluminum and copper.

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  • 溅射工艺制备出场接触电阻退火温度升高下降趋势且溅射工艺的接触电阻比印刷工艺更小

    The back ohmic contact resistance of Al-BSF by DC magnetron sputtering is downtrend with the annealing temperature increasing, and less than that by the screen printing process.

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  • 溅射工艺制备出场接触电阻退火温度升高下降趋势且溅射工艺的接触电阻比印刷工艺更小

    The back ohmic contact resistance of Al-BSF by DC magnetron sputtering is downtrend with the annealing temperature increasing, and less than that by the screen printing process.

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