• 给出了确定透明均匀薄膜光学常数厚度方法

    A method for determining both the optical constants and the thickness of thin films from transmission spectrum has been presented.

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  • 结合激光外差干涉法透射式椭偏测量原理,研究了快速、高精度测量纳米厚度薄膜光学参数方法

    Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.

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  • 结合激光外差干涉术反射式测量技术,设计了一种抗干扰能力强,快速高精度测量纳米厚度薄膜光学参数的方法。

    Optical heterodyne interferometry together with reflective ellipsometry, a fast measurement technology with high anti-interference performance was applied to nanometer film.

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  • 基础上根据薄膜光学计算理论最优化理论,提出一种测量多层薄膜厚度新的全局优化算法——GASA算法。

    According to the theories of thin film calculation and optimization, a new global optimization method - GASA for multilayer film thickness calculation is presented in this paper.

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  • 基础上根据薄膜光学计算理论最优化理论,提出一种测量多层薄膜厚度新的全局优化算法——GASA算法。

    According to the theories of thin film calculation and optimization, a new global optimization method - GASA for multilayer film thickness calculation is presented in this paper.

    youdao

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