... optical thickness moninitor 光学厚度监控器 optical thickness of thin film 薄膜光学厚度 optical thickness tolerances 光学厚度公差 ...
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给出了确定透明均匀薄膜光学常数和厚度的方法。
A method for determining both the optical constants and the thickness of thin films from transmission spectrum has been presented.
结合激光外差干涉法和透射式椭偏测量原理，研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。
Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.
结合激光外差干涉术和反射式椭偏测量技术，设计了一种抗干扰能力强，快速、高精度测量纳米厚度薄膜光学参数的方法。
Optical heterodyne interferometry together with reflective ellipsometry, a fast measurement technology with high anti-interference performance was applied to nanometer film.
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