结果表明，射频功率的改变直接影响到离子对衬底的轰击效应，而反应气压的改变影响气体分子的平均自由程。
Results show that the change of power affects ions' bombardment on the substrate, and that of pressure lead to the change of the mean free path of the molecular.
结果表明，射频功率的改变直接影响到离子对衬底的轰击效应，而反应气压的改变影响气体分子的平均自由程。
Results show that the change of power affects ions' bombardment on the substrate, and that of pressure lead to the change of the mean free path of the molecular.
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