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    In this paper, a method to determine the specific contact resistance of metal-semiconductor contact — circular ring structure method is presented.

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    In this paper the composition of the dark-brown layer is analysed with AES and ESCA and the specific contact resistance has also been measured.

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    The back ohmic contact resistance of Al-BSF by DC magnetron sputtering is downtrend with the annealing temperature increasing, and less than that by the screen printing process.

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  • 溅射工艺制备出接触电阻退火温度升高下降趋势且溅射工艺的接触电阻印刷工艺更小

    The back ohmic contact resistance of Al-BSF by DC magnetron sputtering is downtrend with the annealing temperature increasing, and less than that by the screen printing process.

    youdao

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