利用残余气体分析仪在线监测了真空室内的残余气氛组成。

An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber.

youdao

利用残余气体分析仪在线监测了真空室内的残余气氛组成。

An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber.

youdao