采用微电子机械加工技术作为关键制作技术。
The micro-electron mechanical processing technology is adopted as the key production technology.
器件采用微电子机械加工技术和键合技术研制。
The two parts are fabricated by MEMS technology and combined as aw.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
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