初步研究表明：非线性对微机械电子系统动力学行为有着严重的重要的影响。
The research indicates that nonlinearity has a very important effect on the dynamical behavior of MEMS system.
微驱动器作为微机械电子系统的核心部件，一直是微型机械电子系统(MEMS)的研究热点。
Micro actuator, as the important MEMS component, has become the research focus in Micro-Electronic Mechanical Systems (MEMS) field.
平面微型弹簧是微机械电子系统（MEMS）中一种常用的弹性元件，其蛄构形状的不同将显著影响其刚度系数。
The planar micro-spring is commonly used in MEMS, the rigidity coefficient of the spring changes with the structural form of the spring.
第一章介绍了微机械电子系统这一大背景的研究现状，分析了电水动力驱动的微泵、微马达研究现状，阐明了电水动力微马达的研究目标及研究内容。
In chapter 1, the back ground of MEMS was introduced, and research status of micro pumps and micro motors was analyzed, and the targets and contents of our work were described.
第一章介绍了微机械电子系统这一大背景的研究现状，分析了电水动力驱动的微泵、微马达研究现状，阐明了电水动力微马达的研究目标及研究内容。
In chapter 1, the back ground of MEMS was introduced, and research status of micro pumps and micro motors was analyzed, and the targets and contents of our work were described.
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