EUV掩膜板被自动送入和送出双盒容器(Dualpod)中；其中内层盒可以储存在InSync系统的环境下。

EUV masks are automatically transferred into and out of the dual pod; the inner pod can be stored inside the InSync environment.

youdao

EUV掩膜板被自动送入和送出双盒容器(Dualpod)中；其中内层盒可以储存在InSync系统的环境下。

EUV masks are automatically transferred into and out of the dual pod; the inner pod can be stored inside the InSync environment.

youdao