以一种梁-质量块结构的加速度计为模型,为了在加工过程中,得到完整的质量块结构,使结构具有更好的对称性,对各种凸角补偿方式进行了研究。
To acquire intact mass structure with better symmetry, various methods of convex corner compensation were studied based on a sort of accelerometer of beam-mass structure.
以一种梁-质量块结构的加速度计为模型,为了在加工过程中,得到完整的质量块结构,使结构具有更好的对称性,对各种凸角补偿方式进行了研究。
To acquire intact mass structure with better symmetry, various methods of convex corner compensation were studied based on a sort of accelerometer of beam-mass structure.
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