supervacuum chamber
... supervisor 监察员 supervacuum chamber 超高真空室 superturnstile antenna 超绕杆式电视天线 ...
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该机加真空室的尺寸大，尺寸精度、形位公差及粗糙度要求极高，不同于常规的大型超高真空室。
It's dimension is large, and requirements of accuracy, tolerance and roughness are very strict. It is different from conventional large UHV chamber.
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