该机加真空室的尺寸大，尺寸精度、形位公差及粗糙度要求极高，不同于常规的大型超高真空室。
It's dimension is large, and requirements of accuracy, tolerance and roughness are very strict. It is different from conventional large UHV chamber.
该机加真空室的尺寸大，尺寸精度、形位公差及粗糙度要求极高，不同于常规的大型超高真空室。
It's dimension is large, and requirements of accuracy, tolerance and roughness are very strict. It is different from conventional large UHV chamber.
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