目前国际上多采用能量为几兆电子伏的离子注入到光学材料内，在表面微米量级的范围内形成波导结构。

Nowadays the ions with energies of several MeV are often implanted into the optical materials to form waveguide structures of several microns beneath the surface of the sample.

youdao

实验结果表明：多晶硅薄膜的晶粒界面态和硅离子注入后多晶硅薄膜的晶粒组成结构是密切相关的。

The results show that the properties of grain-boundary states in recrystallized polysilicon films sharply depends on the crystallographic structure of the films.

youdao

通过对离子注入机离子源灯丝绝缘子的结构、尺寸、实际工作效果等方面的分析，提出了一种注入机离子源灯丝绝缘子的优化设计。

Based on the analysis of the structure, size, and actual work efficiency of an ion source filament insulator in ion implantation system, an optimization design of the filament insulator is presented.

youdao