目前国际上多采用能量为几兆电子伏的离子注入到光学材料内，在表面微米量级的范围内形成波导结构。
Nowadays the ions with energies of several MeV are often implanted into the optical materials to form waveguide structures of several microns beneath the surface of the sample.
实验结果表明：多晶硅薄膜的晶粒界面态和硅离子注入后多晶硅薄膜的晶粒组成结构是密切相关的。
The results show that the properties of grain-boundary states in recrystallized polysilicon films sharply depends on the crystallographic structure of the films.
通过对离子注入机离子源灯丝绝缘子的结构、尺寸、实际工作效果等方面的分析，提出了一种注入机离子源灯丝绝缘子的优化设计。
Based on the analysis of the structure, size, and actual work efficiency of an ion source filament insulator in ion implantation system, an optimization design of the filament insulator is presented.
在一个方面，在制备HEMT时可以利用选择性的氟离子注入来产生增强背势垒的结构。
In one aspect, selective fluorine ion implantation is employed when developing HEMTs to create the enhanced back barrier structures.
基于离子注入形成A1N埋层的机理，利用计算机程序动态模拟A 1n层的形成过程及终态结构。
A computer program has been set up to simulate the formation process and final structure of AlN layer on the basis of the formation mechanism of AlN buried layer by ion implantation.
本文介绍离子注入技术对气敏材料表面层组分、结构、电导率及气敏特性进行改性的研究进展。
In this paper we introduce the researches on ion implantation. modification of surface layer composition, construction, conductivity and gas sensitive characterization of gas sensitive materials.
报道了用氦离子注入智能剥离形成SOI结构硅片的新技术，介绍了这种技术的工艺和用剖面透射电镜研究的结果。
A new technology of smart cut using helium ion implantation to form SOI was presented. The process of smart cut was introduced and research results was demonstrated by means of XTEM in this paper.
作者对离子注入对退火后的纯铁表层结构及抗蚀性能的影响进行了试验研究。
Invesezigative experiments have been conducted to survey the influence of ion implantation on the superficial texture of annealed fine iron and the performance of its resistance to corrosion.
迄今为止，人们已经利用离子注入技术在光学晶体、玻璃、半导体以及有机聚合物等大量光学材料中形成了光波导结构。
Up to now, many waveguide structures have been formed by ion implantation in various materials such as optical crystals, glasses, semiconductors and polymers, etc.
用TRIM 95程序对三种离子注入的碰撞参数进行了计算，结果表明，结构的变化明显地与注入参数相关。
The collision parameters of the ions were calculated using TRIM95, showing that the structure change is closely related to the collision parameters of the ions in steel.
用TRIM 95程序对三种离子注入的碰撞参数进行了计算，结果表明，结构的变化明显地与注入参数相关。
The collision parameters of the ions were calculated using TRIM95, showing that the structure change is closely related to the collision parameters of the ions in steel.
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