So it is necessary to conduct an in-depth study. The focus of this paper is to research the microcosmic physical mechanisms of solid surface ion sputtering.
但受研究手段的限制,载能离子溅射沉积薄膜生长机制一直缺乏比较全面、系统的了解,因此有必要进行深入的研究,本文所要研究的重点是载能离子在固体表面溅射微观物理机理。
参考来源 - 载能离子对固体材料表面溅射的模拟研究·2,447,543篇论文数据，部分数据来源于NoteExpress
利用离子溅射镀膜技术镀制了所设计的膜片并且给出了测量结果。
The newly designed films of green HeNe laser have been coated by making use of ion beam sputtering deposition, and the measured results have been given out.
而主导二次离子溅射的过程是动能溅射，它与靶表面的动量沉积(核能损)过程密切相关。
However, the predominant process of secondary ion sputtering is kinetic sputtering, which closely related to the momentum deposition on the target surface (nuclear stopping power).
采用离子束溅射和退火工艺制备了一种新的相变型薄膜vo2。
A novel low temperature switch material VO2 thin film was fabricated by ion-sputtering and annealing.
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