中华电源网-电源企业库-中华电源网 关键词： 硅薄膜；薄膜厚度；负极材料；锂离子电池；电化学性能 [gap=899]Key words: Si film; film thickness; anode; Li ion battery; electrochemical performance
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...料与日商优贝克两大太阳能设备商亦大张旗鼓展出旗下的太阳能设备与技术，惟不同于欧瑞康太阳能专注于硅薄膜 (Thin Film Silicon)太阳能统包方案(Turnkey Solution)，应用材料表示，看准日本住宅屋顶太阳能为最大宗应用领域，因此应用材料以结晶硅太阳能设备方...
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非晶硅薄膜晶体管 a-Si TFT ; amorphous-silicon thin-film transistors ; Amorphous Silicon TFT ; AST
多晶硅薄膜 poly-Si thin film ; poly-Si ; polycrystalline silicon film
多晶硅薄膜晶体管 p-Si TFT ; poly-Si TFT
非晶硅薄膜 a-Si thin film ; a-Si thellon film
低温多晶硅薄膜晶体管 LTPS TFT ; low temperature Poly-Si Thin Film Transistor ; LTP-SI TFT ; LowTemperusingure Poly-Si Thin Film Transistor
硅薄膜太阳能电池 Thin Film Silicon Solar Cells
氮化硅薄膜 [电子] silicon nitride film
二氧化硅薄膜 silica film
非晶硅薄膜电晶体 a-Si TFT
Nanocrystalline silicon thin films become a hot subject for the excellent optical,electronic characteristics and potential application in photoelectric devices.
纳米硅薄膜具有卓越的光学和电学特性,其在光电器件方面潜在的应用越来越引起人们的兴趣。
参考来源 - 纳米硅薄膜及磁控溅射法沉积The frequency was enhanced by means of optimizing the thin silicon membrane's size, periodic structure parameters as well as the thickness of the ridge area. Therefore, the resonance frequency (MHz upwards) was achieved via simulation calculation.
通过理论分析优化硅薄膜尺寸、周期结构参数和脊区厚度，模拟计算出谐振频率即使达到MHz以上，薄膜机械灵敏度也仍可保持nm／Pa量级。
参考来源 - 基于MEMS技术的光纤声传感器研究The silicon thin films were deposited on float glass using sputtering and the properties and structure influenced by process parameters were studied.
本文在玻璃衬底上沉积硅薄膜,研究溅射工艺参数对薄膜的光学性能和结构组分的影响。
参考来源 - 磁控溅射法沉积硅薄膜的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
本文介绍用直流辉光放电装置制备非晶硅薄膜。
Amorphous silicon films were fabricated with a dc glow discharge system.
利用薄膜的暗电导和激活能对硅薄膜的电学特性进行了表征。
The electrical properties of the films were characterized by their room temperature electrical conductivity and the activation energy.
采用甚高频等离子体增强化学气相沉积技术制备了不同衬底温度的微晶硅薄膜。
A series of microcrystalline silicon thin films were fabricated by very high frequency plasma-enhanced chemical vapor deposition at different substrate temperatures (T_s).
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