研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
与传统的微驱动器相比，微电磁驱动器具有体积小、重量轻、加工工艺稳定以及成本低等优点。
As compared with the traditional actuator, Micro-magnetic actuator has advantage such as smaller, lighter, cheaper and more stable process flow.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
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