研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
与传统的微驱动器相比，微电磁驱动器具有体积小、重量轻、加工工艺稳定以及成本低等优点。
As compared with the traditional actuator, Micro-magnetic actuator has advantage such as smaller, lighter, cheaper and more stable process flow.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
分选系统选用圆振与直振实现自动上料、步进电动机及其驱动器实现传输分档以及电磁铁实现自动下料。
The separation system choose circle and line motor, step motor, and electromagnet to realize auto-sorting of the wafers.
分选系统选用圆振与直振实现自动上料、步进电动机及其驱动器实现传输分档以及电磁铁实现自动下料。
The separation system choose circle and line motor, step motor, and electromagnet to realize auto-sorting of the wafers.
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