磁控溅射系统 Magnetron Sputtering System
真空磁控溅射系统 Vacuum evaporative sputtering machine
静态溅射系统 Static Sputtering System
反应射频磁控溅射系统 Reactive Sputtering System
组合溅射系统 Combinatori
多阴极溅射系统 Multi Cat
非平衡磁控溅射系统 Unbalanced magnetron sputtering system
溅射枪溅镀系统 sputter-gun sputtering system
雷射溅镀系统 Laser Ablation System
研究了基片摆动和基片自转的磁控溅射系统中基片摆动角振幅和基片自转角速度对磁控溅射膜厚均匀性的影响。
The influence of rotation speed and pendulum amplitude on the thickness uniformity of film deposited by radio frequency magnetron sputtering system with rotation and pendulum was researched.
介绍了基于FPGA的太阳能真空集热管磁控溅射镀膜机控制系统的整体设计和工程实现过程。
This paper introduces an integrated design and implementation of the SCS control system based on FPGA.
通过在离子束溅射镀膜系统上的实验研究并用仿真模型进行回归分析，给出了准确的余弦分布函数指数，最终建立能够定量计算的仿真模型。
By some experimental researches on IBSD system and regression analyzing, the exponent of cosine distribution is determined and the emluator are completed for quantificationally simulation.
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