为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
本文报告了一种基于低温共烧陶瓷技术和金锡共晶焊料的射频微机电的封装技术，并评估了该封装结构的物理及射频特性。
This paper reports on an RF MEMS package based on LTCC technology and gold-tin eutectic bonding, and also evaluates physical and RF characteristics of the proposed structure.
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