外延沉积接着用以形成一外延层于该外延表面上。
Epitaxial deposition is then used to form an epitaxial layer on the epitaxy surface.
本发明提供一外延沉积工艺，其包含干式蚀刻工艺与后续的外延沉积工艺。
An epitaxial deposition process including a dry etch process, followed by an epitaxial deposition process is disclosed.
评论了国内外化学气相沉积的异质外延金刚石膜制备技术、性质表征以及应用和展望。
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.
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