side etching侧面蚀刻 D8224 anisotopic etching各向异性蚀刻,费等向性蚀刻 系指深度方向的蚀刻速度,较水平方向的蚀刻速度为大的场合,亦就是蚀刻速度...
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In the second part of the paper, a photomask glass-based microchip was wet etched with buffered HF. And the problems of side etching and mask erosion were researched.
其次,论文的第二部分采用湿法刻蚀的方法制作了以photomask玻璃为基体材料的微分析芯片,并研究了湿法刻蚀中的侧蚀和掩模穿孔问题。
参考来源 - 基于硅材料与玻璃的微分析芯片制作技术的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
The protection of the circuits on chip is also needed to consider in the front-side etching.
对芯片的正面结构释放时同样需要考虑保护芯片上的电路。
A process of acid etching one side of float glass to obtain a distinctive, uniformly smooth and sati.
这是一个通过酸蚀浮法玻璃来获得一种与众不同,光滑均匀,像绸缎一样的玻璃的过程。
Using MEMS technics to process the silicon vibration element, in the process two side lithography and etching has being used many times.
介绍了旋转载体用硅微机械陀螺敏感元件的结构和利用双面多次光刻、腐蚀等微机械工艺加工得到硅振动单元的工艺过程。
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