The protection of the circuits on chip is also needed to consider in the front-side etching.
对芯片的正面结构释放时同样需要考虑保护芯片上的电路。
A process of acid etching one side of float glass to obtain a distinctive, uniformly smooth and sati.
这是一个通过酸蚀浮法玻璃来获得一种与众不同，光滑均匀，像绸缎一样的玻璃的过程。
Using MEMS technics to process the silicon vibration element, in the process two side lithography and etching has being used many times.
介绍了旋转载体用硅微机械陀螺敏感元件的结构和利用双面多次光刻、腐蚀等微机械工艺加工得到硅振动单元的工艺过程。
The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography.
其特点在于，利用KOH体硅腐蚀和双面光刻工艺制作了一种独特的三维自吸氧阴极结构。
The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography.
其特点在于，利用KOH体硅腐蚀和双面光刻工艺制作了一种独特的三维自吸氧阴极结构。
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